PL-T
Desktop Pneumatic  
(NIL) System​
PL-MR
Hybrid Roller-Based  (NIL) System
​​PL-S
Vacuum-Pneumatic  
(NIL) System
PL-AS
Wafer-Scale Semiconductor-Grade  (NIL) System​
PL-R
Mass-Production Roll-to-Roll (NIL) System
PL-P
High-Precision Plate-to-Plate (NIL) System​
PL-SR
Inkjet Step-and-Repeat (NIL) System​
PL-A
Full-Automatic Pneumatic (NIL) System

Nanoimprint Lithography (NIL) Equipment​

A ​​nanoimprint lithography (NIL) system​​ is a specialized device that utilizes ​​precision mechanical imprinting and curing processes​​ to replicate nanoscale patterns from a template onto a resist-coated substrate, enabling ​​high-resolution, low-cost nanostructure fabrication​​.


As a ​​breakthrough alternative to optical lithography​​, NIL overcomes the resolution limitations of traditional photolithography and serves as a ​​critical tool for advancing nanotechnology​​ in semiconductor, photonics, and biomedical applications.

NIL Process Development
​​Nanoimprint materials (NIL resists)​​ serve the same fundamental purpose as photoresists in lithography - replicating microscopic patterns from templates to substrates through mechanical imprinting rather than optical exposure.
The nanoimprint process represents a complete application-specific system integrating imprint methodology selection and material optimization - collectively known as 'process know-how' .
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​Nanoimprint technology demands a closed-loop ecosystem of equipment, materials, and processes.
PRINANO combines decades of expertise in NIL systems, plus 20+ years in materials and process innovation.​