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PL-A Full-Automatic Pneumatic
(NIL) System
<10nm
Resolution
0nm
Residual layer
≥30WPH*
Wafers Per Hour
12 inches.
Maximum

The ​​PL-A​​ is a ​​dual-chamber vacuum-assisted pneumatic nanoimprinting system​​ capable of achieving:

✔ ​​Sub-10 nm resolution​​

✔ ​​>99.5% pressure uniformity​​ across imprint area

✔ ​​Defect-free patterning​​ for high-end applications

Equipment Introduction
Device Video
Related Products

The ​​PL-A​​ is a ​​nanoimprint system​​ specifically designed for ​​wafer-scale pilot production and industrial mass manufacturing​​. This system offers ​​high throughput, ultra-high resolution, full automation, and user-friendly operation​​.


The ​​PL-A system​​ incorporates PRINANO's proprietary ​​dual-chamber vacuum-pneumatic nanoimprint technology​​, combined with patented ​​SFP & Hybird Mold® imprinting technology​​. It ensures ​​<0.5% pressure uniformity error​​ across the wafer surface during imprinting. The system not only enables ​​residual-layer-free nanoimprinting​ but also ​​minimizes particle-induced defects​​ while preserving the integrity of nanostructures, and supports ​​curved-surface imprinting processes​​.


​​To meet diverse customer needs​​, we provide ​​customized solutions​​, developing dedicated functional modules tailored to specific application requirements.

Craft Demonstration Video򠅢
Equipment Working Video򠅢
PL-R
Mass-Production Roll-to-Roll (NIL) System
PL-P
High-Precision Plate-to-Plate (NIL) System​
PL-SR
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