The PL-A is a dual-chamber vacuum-assisted pneumatic nanoimprinting system capable of achieving:
✔ Sub-10 nm resolution
✔ >99.5% pressure uniformity across imprint area
✔ Defect-free patterning for high-end applications
The PL-A is a nanoimprint system specifically designed for wafer-scale pilot production and industrial mass manufacturing. This system offers high throughput, ultra-high resolution, full automation, and user-friendly operation.
The PL-A system incorporates PRINANO's proprietary dual-chamber vacuum-pneumatic nanoimprint technology, combined with patented SFP & Hybird Mold® imprinting technology. It ensures <0.5% pressure uniformity error across the wafer surface during imprinting. The system not only enables residual-layer-free nanoimprinting but also minimizes particle-induced defects while preserving the integrity of nanostructures, and supports curved-surface imprinting processes.
To meet diverse customer needs, we provide customized solutions, developing dedicated functional modules tailored to specific application requirements.
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